晶圆尺寸:8”;厚度 200~1600um;
Crystal Size: 8 "; thickness of 200~1600um;
晶圆种类:硅,坤化镓或其他的单边,V 型缺口晶圆;
Crystal types: silicon, gallium Kun chemical or other one-sided, V-type notch wafer;
撕膜胶种类: 胶带撕膜;宽度:38-100 毫米;长度:100 米;
Type of film adhesive tape; width: 38-100 mm; length: 100 m;
撕膜角度:<45 度,并且在 5°~45°可调节;
Tear film angle: <45 degrees, and adjustable at 5 ° ~45 °;
撕膜温度:室温到 100 ℃范围可调,控温精度+/-3℃;
Tpping film temperature: room temperature to 100℃, temperature control accuracy + / -3℃;
晶圆台盘:通用防静电特氟隆涂层接触式金属台盘; 带可控加热功能,温度最高可达 100℃;
Crystal platform plate: universal anti-static Teflon coating contact metal platform plate; with controlled heating function, the temperature is up to 100℃;
台盘带吸真空功能;
Vacuum suction function of platform plate;
装卸方式: 晶圆手动放置与取出;
loading and unloading mode: manual placement and removal of the wafer;
防静电控制:内置防静电离子发生器;
Anti-static control: built-in anti-static ion generator;
晶圆定位: 弹簧销钉定位;
Particle positioning: spring pin positioning;
安全保护:配置紧急停机按钮;
Safety protection: configure the emergency shutdown button;
控制单元: 基于 PLC 控制,并配有 5.7”触摸屏;
Control unit: based on PLC control and equipped with 5.7 " touch screen;
机器指示:三色灯塔显示机台工作状态;
Machine indication: three-color lighthouse display console operating status;
晶圆良率: ≥99.9%;
Crystal yield: ≥ 99.9%;
贴膜质量: 没有气泡:(不包括灰尘颗粒气泡)
Quality of film: No bubbles: (excluding dust particle bubbles)
每小时产能:≥50-65 片晶圆
hourly capacity: ≥ 50-65 wafers;
更换产品时间:≤ 5 分钟;
Replacement of product time: ≤ 5 minutes;