全自动载环晶圆传片机

承载环尺寸:8寸和12寸

Bearing ring size: 8 inches and 12 inches

三个上料工位；

Three loading work stations;

控制系统：工控机系统；

Control system: industrial control machine system;

ESD Fan；

FFU过滤器；

FFU filter;

UPS电源；

UPS power supply;

SECS/GEM 联机

The SECS/GEM is brought online

每小时产能：≥100 片晶圆；

hourly capacity: ≥ 100 wafers;

机器指示：三色灯塔显示机台工作状态

Machine indication: three-color lighthouse display console operating status