全自动晶圆传片机

Ø  晶圆尺寸 8&12”；厚度 200~1600um；

Crystal Size 8 & 12 "; thickness 200~1600um;

Ø  晶圆种类 硅，坤化镓或其他的单边,V 型缺口晶圆；

Crystal types of silicon, gallium Kund or other one-sided, V-type notch wafer;

Ø  8"/12" 晶圆分选传送功能，支持12" FOUP,  8" Open Cassette；

8 "/ 12" wafer transfer transfer supporting 12 "FOUP,8" Open Cassette;

Ø  两套带罩子8"/12" 晶圆盒Load Port Station;

Two sets with cover 8 "/ 12" wafer cartridge Load Port Station;

Ø  一套传片Robot和带Y轴移动模块；

A set of transmission Robot and Y-axis moving module;

Ø  一套自动对位Aligner；

A set of automatic alignment Aligner; 

Ø  工控机系统；

Industrial control machine system;

Ø  OCR系统；

OCR system;

Ø  ESD Fan；

Ø  FFU过滤器；

FFU filter;

Ø  UPS电源；

UPS power supply;

Ø  SECS/GEM 联机；

The SECS/GEM is brought online;

Ø  每小时产能：≥150 片晶圆；

hourly capacity: ≥ 150 wafers;

Ø  更换产品时间：≤ 5 分钟；

Replacement of product time: ≤ 5 minutes;

Ø  机器指示：三色灯塔显示机台工作状态；

Machine indication: three-color lighthouse display console operating status;